Search results for "focused ion beam-induced deposition"

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Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

2019

This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication.

focused ion beamMaterials scienceIon beamlcsh:Mechanical engineering and machinery02 engineering and technologyReview01 natural sciencesFocused ion beamIoncircuit editelectrical contacts0103 physical sciencesfocused ion beam-induced depositionDeposition (phase transition)lcsh:TJ1-1570Electrical and Electronic EngineeringThin filmLithographyFocused ion beam-induced deposition010302 applied physicsFocused ion beamNanowiresbusiness.industryMechanical Engineering021001 nanoscience & nanotechnologyElectrical contactsfocused electron beam-induced depositionFocused electron beam-induced depositionthin filmsnanowiresControl and Systems EngineeringOptoelectronicslithographyErratum0210 nano-technologybusinessLayer (electronics)Micromachines
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